A request for a scandium sputtering target starts with one choice. Do you need elemental scandium (Sc) or an aluminum–scandium alloy (AlSc)? The two targets require different chemistry specifications. State the material on its own quotation line, then give the supplier the target drawing and the measurements you need on the certificate of analysis.
Specify the purity basis for elemental scandium
Ask the supplier to identify the denominator in each reported purity value. Overall scandium purity expresses scandium as a fraction of the material as a whole. A rare-earth-basis value such as Sc/TREM expresses scandium as a fraction of the reported total rare-earth metals. Commercial material reports can list both a TREM value and a Sc/TREM ratio. Ask how the supplier calculates each value and which elements its report covers. Example scandium metal analysis showing both reporting bases
For example, an RFQ might separately require Sc ≥99.9% overall and Sc/TREM ≥99.99%. Those figures describe different fractions and serve here as illustrative requirements. If your process has limits for particular metallic impurities or for oxygen, request those limits separately and ask which testing methods and reporting limits apply. Specify whether the certificate must represent the delivered target or its production lot. Basis Materials scandium sputtering target
Specify the composition basis for aluminum–scandium
Write the requested scandium fraction in atomic percent (at%) or weight percent (wt%), identify the aluminum balance, and give a tolerance on the same basis. For an ideal binary Al–Sc alloy, 10 at% Sc corresponds to approximately 15.62 wt% Sc because scandium atoms are heavier than aluminum atoms. That example illustrates why a drawing that says only “AlSc 10%” leaves room for different quotations. State any intentional additions and any impurity limits separately. IUPAC commission standard atomic weights
Keep the metal target composition and the desired film composition as separate RFQ fields. For example, AlSc targets can be used in reactive sputtering of aluminum scandium nitride films. Give the supplier the specified alloy chemistry and describe the intended film so the process owner can evaluate the quotation against the qualified setup. Materion AlSc target application overview · AlScN reactive sputtering study · Basis Materials aluminum–scandium sputtering target
Send the assembly and documentation requirements
For a bare target, include the target dimensions, tolerances, and any tool-specific mounting features. For a bonded assembly, identify the target thickness, backing-plate material and dimensions, total assembled thickness, and any qualified bonding or inspection requirements. A cathode model and a drawing or previously approved part number help the supplier identify the correct configuration. AJA International target and backing-plate options
For each quotation line, include the material, grade or alloy fraction and basis, drawing revision, quantity, and the chemistry or inspection documents required with the shipment. If you are replacing an existing target, share the accepted drawing and certificate and identify any changes. Request a materials quote