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Basis Materials representative image of Aluminum Titanium Silicon Planar Target

Representative image. Actual appearance may vary with composition, dimensions and manufacturing process.

BASIS MATERIALS / TARGET

Aluminum Titanium Silicon Planar Target

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Specifications and availability are confirmed during quotation.

Aluminum Titanium Silicon Planar Target is a source material for physical vapor deposition by sputtering. The Aluminum Titanium Silicon identity helps define the film chemistry under a specified deposition process. Film chemistry and process compatibility should be reviewed for the intended coating. Planar geometry and mounting requirements depend on the deposition system. Basis Materials can discuss custom dimensions, purity requirements and bonding options during quotation, with the final configuration confirmed for the project.

Technical specifications

Material familyMetal Alloy
Constituent elementsAl, Ti, and Si
FormSputtering Target
Custom options availabletrue
Target configurationPlanar
AvailabilityMade to Order

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