A request for a zinc oxide sputtering target should identify whether the source is undoped zinc oxide (ZnO) or aluminum-doped zinc oxide (AZO). That distinction affects what the supplier quotes and how you compare target options. If your goal is a film with a specified sheet resistance or optical transmission, put those values in the inquiry as film requirements and list the target specification separately.
Identify the ceramic and composition
| Target | What to put on the quote request |
|---|---|
| Undoped ZnO | Zinc oxide with no intentionally added dopant, the required purity, and limits on any impurities that matter to your process |
| AZO | Aluminum-doped zinc oxide, the required aluminum content, and the exact basis on which that content is reported |
For AZO, a weight percentage of Al₂O₃ in an oxide mixture and an atomic percentage of Al on the metal sublattice describe different quantities. If your existing drawing uses an oxide weight ratio, reproduce the ratio and identify both oxides. If it uses atomic percent, state whether the denominator is all atoms or only the metal atoms. In one published AZO study, the researchers used a target specified as 98 wt% ZnO and 2 wt% Al₂O₃. That describes the source used in that study. Your inquiry should carry the composition approved for your application. Peer-reviewed AZO deposition study
Keep target properties and film acceptance separate
A target drawing and certificate can establish the specified dimensions and composition. For target density, state the required value and whether it is an absolute bulk density or a percentage of a stated reference density. If your tool has an electrical requirement for the target, ask what target resistivity data are available.
Film acceptance requires measurements on a film made under your process conditions. The published AZO study reported spatial variations in film composition and resistivity even with a single target. For a transparent conductive coating, report the substrate, film thickness, transmission wavelength or range, and sheet resistance target together. This gives the supplier enough context to review the material and gives your process team a defined basis for qualification. AZO film composition and resistivity measurements
Confirm the target assembly before ordering
- Provide the cathode model, qualified power mode and any constraints from the equipment manual or process owner.
- Give the diameter and ceramic thickness. For a bonded assembly, include the backing drawing and total assembly thickness as separate values.
- State the requested quantity, lot documentation and any inspection requirements that affect acceptance.
If you are replacing a qualified target, include the previous drawing, lot documentation or part number so the quote can be checked against what already works. ZnO sputtering targets · AZO sputtering targets · Request a quote